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Merge branch 'master' into cmake-refactor
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@Curve
Curve committed Mar 21, 2024
2 parents ea1fea1 + 5c09768 commit 8647401
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Showing 4 changed files with 107 additions and 23 deletions.
2 changes: 1 addition & 1 deletion examples/holeEtching/config.txt
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Expand Up @@ -2,7 +2,7 @@

# all length units are in micrometers (um)
# Domain
gridDelta=5.0 # um
gridDelta=4.0 # um
xExtent=100.0 # um
yExtent=100.0 # um

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1 change: 1 addition & 0 deletions examples/holeEtching/holeEtching.cpp
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Expand Up @@ -13,6 +13,7 @@ int main(int argc, char *argv[]) {
constexpr int D = 3;

psLogger::setLogLevel(psLogLevel::INTERMEDIATE);
omp_set_num_threads(16);

// Parse the parameters
Parameters<NumericType> params;
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2 changes: 2 additions & 0 deletions examples/holeEtching/holeEtching.py
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Expand Up @@ -43,6 +43,8 @@
oxySputterYield=params["A_O"],
etchStopDepth=params["etchStopDepth"],
)
parameters = model.getParameters()
parameters.Mask.rho = 100.

# process setup
process = vps.Process()
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125 changes: 103 additions & 22 deletions python/pyWrap.cpp
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Expand Up @@ -571,9 +571,84 @@ PYBIND11_MODULE(VIENNAPS_MODULE_NAME, module) {
pybind11::arg("stickingProbabilityP2") = 0.,
pybind11::arg("rateP2") = 0., pybind11::arg("orderP2") = 0.);

// SF6O2 Parameters
pybind11::class_<SF6O2Implementation::Parameters<T>::MaskType>(
module, "SF6O2ParametersMask")
.def(pybind11::init<>())
.def_readwrite("rho", &SF6O2Implementation::Parameters<T>::MaskType::rho)
.def_readwrite("beta_F",
&SF6O2Implementation::Parameters<T>::MaskType::beta_F)
.def_readwrite("beta_O",
&SF6O2Implementation::Parameters<T>::MaskType::beta_O)
.def_readwrite("A_sp",
&SF6O2Implementation::Parameters<T>::MaskType::A_sp)
.def_readwrite("B_sp",
&SF6O2Implementation::Parameters<T>::MaskType::B_sp)
.def_readwrite("Eth_sp",
&SF6O2Implementation::Parameters<T>::MaskType::Eth_sp);

pybind11::class_<SF6O2Implementation::Parameters<T>::SiType>(
module, "SF6O2ParametersSi")
.def(pybind11::init<>())
.def_readwrite("rho", &SF6O2Implementation::Parameters<T>::SiType::rho)
.def_readwrite("k_sigma",
&SF6O2Implementation::Parameters<T>::SiType::k_sigma)
.def_readwrite("beta_sigma",
&SF6O2Implementation::Parameters<T>::SiType::beta_sigma)
.def_readwrite("A_sp", &SF6O2Implementation::Parameters<T>::SiType::A_sp)
.def_readwrite("B_sp", &SF6O2Implementation::Parameters<T>::SiType::B_sp)
.def_readwrite("Eth_ie",
&SF6O2Implementation::Parameters<T>::SiType::Eth_ie)
.def_readwrite("Eth_sp",
&SF6O2Implementation::Parameters<T>::SiType::Eth_sp)
.def_readwrite("A_ie", &SF6O2Implementation::Parameters<T>::SiType::A_ie);

pybind11::class_<SF6O2Implementation::Parameters<T>::PassivationType>(
module, "SF6O2ParametersPassivation")
.def(pybind11::init<>())
.def_readwrite(
"Eth_ie",
&SF6O2Implementation::Parameters<T>::PassivationType::Eth_ie)
.def_readwrite(
"A_ie", &SF6O2Implementation::Parameters<T>::PassivationType::A_ie);

pybind11::class_<SF6O2Implementation::Parameters<T>::IonType>(
module, "SF6O2ParametersIons")
.def(pybind11::init<>())
.def_readwrite("meanEnergy",
&SF6O2Implementation::Parameters<T>::IonType::meanEnergy)
.def_readwrite("sigmaEnergy",
&SF6O2Implementation::Parameters<T>::IonType::sigmaEnergy)
.def_readwrite("exponent",
&SF6O2Implementation::Parameters<T>::IonType::exponent)
.def_readwrite("inflectAngle",
&SF6O2Implementation::Parameters<T>::IonType::inflectAngle)
.def_readwrite("n_l", &SF6O2Implementation::Parameters<T>::IonType::n_l)
.def_readwrite("minAngle",
&SF6O2Implementation::Parameters<T>::IonType::minAngle);

pybind11::class_<SF6O2Implementation::Parameters<T>>(module,
"SF6O2Parameters")
.def(pybind11::init<>())
.def_readwrite("ionFlux", &SF6O2Implementation::Parameters<T>::ionFlux)
.def_readwrite("etchantFlux",
&SF6O2Implementation::Parameters<T>::etchantFlux)
.def_readwrite("oxygenFlux",
&SF6O2Implementation::Parameters<T>::oxygenFlux)
.def_readwrite("etchStopDepth",
&SF6O2Implementation::Parameters<T>::etchStopDepth)
.def_readwrite("beta_F", &SF6O2Implementation::Parameters<T>::beta_F)
.def_readwrite("beta_O", &SF6O2Implementation::Parameters<T>::beta_O)
.def_readwrite("Mask", &SF6O2Implementation::Parameters<T>::Mask)
.def_readwrite("Si", &SF6O2Implementation::Parameters<T>::Si)
.def_readwrite("Polymer",
&SF6O2Implementation::Parameters<T>::Passivation)
.def_readwrite("Ions", &SF6O2Implementation::Parameters<T>::Ions);

// SF6O2 Etching
pybind11::class_<psSF6O2Etching<T, D>, psSmartPointer<psSF6O2Etching<T, D>>>(
module, "SF6O2Etching", processModel)
.def(pybind11::init<>())
.def(pybind11::init(
&psSmartPointer<psSF6O2Etching<T, D>>::New<
const double /*ionFlux*/, const double /*etchantFlux*/,
Expand All @@ -585,29 +660,12 @@ PYBIND11_MODULE(VIENNAPS_MODULE_NAME, module) {
pybind11::arg("sigmaIonEnergy") = 10.,
pybind11::arg("ionExponent") = 100.,
pybind11::arg("oxySputterYield") = 3.,
pybind11::arg("etchStopDepth") = std::numeric_limits<T>::lowest());

// Fluorocarbon Etching
pybind11::class_<psFluorocarbonEtching<T, D>,
psSmartPointer<psFluorocarbonEtching<T, D>>>(
module, "FluorocarbonEtching", processModel)
.def(pybind11::init<>())
.def(
pybind11::init(&psSmartPointer<psFluorocarbonEtching<T, D>>::New<
const double /*ionFlux*/, const double /*etchantFlux*/,
const double /*polyFlux*/, T /*meanEnergy*/,
const T /*sigmaEnergy*/, const T /*ionExponent*/,
const T /*deltaP*/, const T /*etchStopDepth*/>),
pybind11::arg("ionFlux"), pybind11::arg("etchantFlux"),
pybind11::arg("polyFlux"), pybind11::arg("meanIonEnergy") = 100.,
pybind11::arg("sigmaIonEnergy") = 10.,
pybind11::arg("ionExponent") = 100., pybind11::arg("deltaP") = 0.,
pybind11::arg("etchStopDepth") = std::numeric_limits<T>::lowest())
.def(pybind11::init(&psSmartPointer<psFluorocarbonEtching<T, D>>::New<
const FluorocarbonImplementation::Parameters<T> &>),
pybind11::arg("etchStopDepth") = std::numeric_limits<T>::lowest())
.def(pybind11::init(&psSmartPointer<psSF6O2Etching<T, D>>::New<
const SF6O2Implementation::Parameters<T> &>),
pybind11::arg("parameters"))
.def("setParameters", &psFluorocarbonEtching<T, D>::setParameters)
.def("getParameters", &psFluorocarbonEtching<T, D>::getParameters,
.def("setParameters", &psSF6O2Etching<T, D>::setParameters)
.def("getParameters", &psSF6O2Etching<T, D>::getParameters,
pybind11::return_value_policy::reference);

// Fluorocarbon Parameters
Expand Down Expand Up @@ -747,6 +805,29 @@ PYBIND11_MODULE(VIENNAPS_MODULE_NAME, module) {
&FluorocarbonImplementation::Parameters<T>::Polymer)
.def_readwrite("Ions", &FluorocarbonImplementation::Parameters<T>::Ions);

// Fluorocarbon Etching
pybind11::class_<psFluorocarbonEtching<T, D>,
psSmartPointer<psFluorocarbonEtching<T, D>>>(
module, "FluorocarbonEtching", processModel)
.def(pybind11::init<>())
.def(
pybind11::init(&psSmartPointer<psFluorocarbonEtching<T, D>>::New<
const double /*ionFlux*/, const double /*etchantFlux*/,
const double /*polyFlux*/, T /*meanEnergy*/,
const T /*sigmaEnergy*/, const T /*ionExponent*/,
const T /*deltaP*/, const T /*etchStopDepth*/>),
pybind11::arg("ionFlux"), pybind11::arg("etchantFlux"),
pybind11::arg("polyFlux"), pybind11::arg("meanIonEnergy") = 100.,
pybind11::arg("sigmaIonEnergy") = 10.,
pybind11::arg("ionExponent") = 100., pybind11::arg("deltaP") = 0.,
pybind11::arg("etchStopDepth") = std::numeric_limits<T>::lowest())
.def(pybind11::init(&psSmartPointer<psFluorocarbonEtching<T, D>>::New<
const FluorocarbonImplementation::Parameters<T> &>),
pybind11::arg("parameters"))
.def("setParameters", &psFluorocarbonEtching<T, D>::setParameters)
.def("getParameters", &psFluorocarbonEtching<T, D>::getParameters,
pybind11::return_value_policy::reference);

// Isotropic Process
pybind11::class_<psIsotropicProcess<T, D>,
psSmartPointer<psIsotropicProcess<T, D>>>(
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